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Quartz Boat

product details

The 8 inch vertical quartz boat is designed to securely hold 200 mm wafers in vertical furnace systems used for high-temperature processes such as oxidation, diffusion, and LPCVD. Manufactured from high-purity fused quartz, it offers exceptional resistance to thermal shock, chemical corrosion, and mechanical deformation.

Engineered for vertical loading configurations, this quartz boat ensures uniform wafer spacing and stable alignment, promoting even gas distribution and consistent thermal exposure across all wafer surfaces. Its rigid construction maintains integrity under thermal cycling, reducing contamination risks and enhancing process repeatability.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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